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ALL CATEGORIES   Wafer Fabrication Eq   Plasma Processing Eq   Plasma Etch Eq   Parallel Pl Tools   Single Chamber Tools

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Item ID: 251431

1 Offered at Best Price PLASMA-THERM SLR 770 ICP Plasma Etcher PLASMA-THERM SLR 770 Inductively Coupled Plasma Etcher Single Process Chamber with SLR (Shuttle Lock Transfer) Load Lock Manual Load with Load Lock Handling Currently Configured for 4” Wafers Ceramic Wafer Clamp with Helium Backside Cooling System Gas Distribution Box with 5ea Gas Channels ENI ACG-6 RF Generator: 600W @ 13.56MHz ENI Automatic Matching Network RFPP RF20M RF Generator: 2000W @ 2.0MHz RFPP Automatic Matching Network Six Zone Chamber Heater with Temperature Controller LEYBOLD 900 Turbo Pump with Mag 1000 Controller MKS ITR Ion Gauge Controller VAT Gate Valve with PM-5 Controller Mechanical Roughing Pump NESLAB HX-75 Chiller Electrical Disconnect Box - 208V, 60Hz, 3 phase

Location: Plano, Texas

Unit Price	Unstated
Number of Units	1
Manufacturer	Plasma-Therm
Model	SLR-770
Wafer Size Range
Minimum	75 mm
Maximum	200 mm
Set Size	100 mm
Process	Inductively Coupled Plasma Etching
Controller Type	PC Controller Type
End Point Detection	Horiba Jobin-Yvon
Loadlock
Loadlock Yes/No	YES
Number of Gas Inputs	Five Gas
Chillers
Number of Chillers	1
Chiller #1Manufacturer/Model	Neslab HX-75

OFFERED BY:

(click name below to visit its website directly)
Catalyst Equipment Corporation
Plano , Texas
+1.972.943.0808

 

Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas   Make OFFERSend an INQUIRY