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Item ID: 35762

1 Offered at Best Price Hitachi S-7000 CD SEM Measurement Tool   ... other images

Location: Plano, TX

Unit Price	Unstated
Number of Units	1
Manufacturer	Hitachi
Model	S-7000
Wafer Size Range
Minimum	100 mm
Maximum	150 mm
Set Size	150 mm
Resolution	150.00 Å
Acceleration Voltage
Maximum Voltage	3 kV
Critical Dimension Measurement Range	0.10 µm  -  200.00 µm
CD Measurement Resolution	150  Å  (15 nm)
Cassette to Cassette	YES
Tilting Stage	YES
Gun Type	Field Emission
Other Information	Cassette-to-Cassette Handling for 4”, 5” & 6” Wafers 100X ~ 100,000X Magnification 0.1 ~ 200 µm Measurement Range 15 nm Guaranteed (at 1 kV) Secondary Electron Image Resolution ± 0.02 µm or ±1%, whichever is greater, Reproducibility 0.7 ~ 3 kV (100 V/step) Auto-Focus and Auto-Stigmation Fully Automated CD Measurement Fully Programmable Stage with up to 60° Tilt Multi Point Measurement Capability
Year of Manufacture	1989
Condition	Good

OFFERED BY:

(click name below to visit its website directly)
Catalyst Equipment Corporation
Plano , Texas
+1.972.943.0808

 

Deal directly with Owner:  Catalyst Equipment Corporation of Plano, Texas   Make OFFERSend an INQUIRY