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Rapid Thermal Processing Equipment


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List all 3 product types under Rapid Thermal Processing EquipmentList all 3 product types under Rapid Thermal Processing Equipment


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
217150
AET Technologies  

AET Technologies  

Rapid Annealing Furnace 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

AET TECHNOLOGIES Rapid Annealing Furnace:

AET TECHNOLOGIES Rapid Annealing Furnace

  • 130mm (dia.) x 740mm (long) Quartz Annealing Chamber for 3” Wafers with 27ea IR Lamps
  • EUROTHERM 2704 Advanced Multi-Loop Temperature Controller
  • EUROTHERM 7300A Three Phase Power Controller
  • LEYBOLD TTR 91 S Thermovac Vacuum Sensor
  • LEYBOLD Display One Single Channel Vacuum Gauge Display
  • VAT 24428-KA31 Pneumatic HV Right Angle Valve
  • TELSTAR RD-9 Vacuum Pump
  • HORIBA SEC-E40 Mass Flow Meter
  • HORIBA ROD-1 MB Modular Readout
  • Type K Sheathed Alumina Thermocouples – System Control, Over-Temp Sense, User Sense
  • Heating power: 50kW
  • Input Power: 380-400VAC; 3Ph; 50Hz 125A
1   Plano, Texas
236583
AG Associates  

AG Associates  

Heatpulse 410 

List all items of this typeBenchtop RTP Tools

in Rapid Thermal Processing Equipment

AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool:

AG ASSOCIATES Heatpulse 410 Rapid Thermal Processor

  • Serial Number 1K7043 
  • Single Wafer Process
  • Single Rotometer Controlled Gas Channel
  • Multi-Step Process Cycle Capability
  • Programmable Ramp-Up Rates from 10ºC-250ºC/sec.
  • 450 - 1150ºC Recommended Operating Temp Range; 1,250ºC Peak Temperature
  • Thermocouple Temperature Control
  • 1-300 Seconds Processing Cycle
  • PC Controller with pCat Software
  • 208V, 3Ph, 60Hz, 90A Input Power
  • Price: ………………………………………………….……..………..$ 29,500.00
1 29,507.91 Plano, Texas
251921
Mattson Technology  

Mattson Technology  

SHS 2800 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson SHS 2800 RTP:

Description:

- Tool controller with Win7 (Updated 2019)

- Remonte controller backside with monitor and keyboard

- Temperatur measurement with Ripple Pyrometrie

- High cooling with Jet Venturi System

- Process: Oxid (BPSG + RTP Tempern)

1   N* Regensburg, Bavaria
251922
Mattson Technology  

Mattson Technology  

SHS 2800 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

Mattson SHS 2800 RTP:

Description:

- Tool controller with Win7 (Updated 2018)

- Remonte controller backside with monitor and keyboard

- Temperatur measurement with Ripple Pyrometrie

- High cooling with Jet Venturi System

- Process: Oxid (BPSG + RTP Tempern)

1   N* Regensburg, Bavaria
246567
Ultratech Inc  

Ultratech Inc  

LSA100A 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

ULTRATECH LSA100A, s/n: 6114, Laser Spike Anneal:

Laser Spike Anneal

1   Dresden, Saxony
249575
Ultratech Inc  

Ultratech Inc  

LSA100A 

List all items of this typeSingle Chamber RTP Tools

in Production RTP Tools

ULTRATECH LSA100A, s/n: 6125, 300mm:

ULTRATECH LASER ANNEAL CT02

1   East Fishkill, New York


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Rapid Thermal Processing Equipment:
AET Technologies, AG Associates, Mattson Technology, Ultratech Inc